【摘要】 本文根据双模干涉理论设计并研制了GaAs同质结材料对称耦合波导型光开关/光调制器。利用自对准工艺技术获得了良好的电极对称性,经测试器件消光比达20dB以上,开关特性良好。高速开关特性测试正在进行中。预计该器件在开关列阵、高速光调制方面有较广泛地应用。更多还原

【Abstract】 According to tow eigenmodes interference theory, a symmetric coupler waveguide optic switches/modulators have been designed and fabricated in n-/n+ GaAs. The better electrode symmetry is gained with self-alignment technology. The crosstalk radio of the device was measured to exceed to 20dB, and the better characteristic of switch was gained. The characteristic of high-speed switch is measuring. The device is widely used in the switch array and high-speed modulation.更多还原