【摘要】 本文研究了真空阴极电弧沉积 TiN 装饰膜的工艺及其应用.利用 X 射线衍射、扫描电镜等方法,分析了膜层性能与沉积工艺之间的关系,结果表明:(1)适当增大气氛压力,可减少 Ti 液滴,从而提高了膜层的显微硬度和耐腐蚀性能;(2)膜层颜色与负偏压和氮分压有关.本文报导了工艺参数对膜层织构和品格畸变的影响.本文还对表壳、表带、餐具.陶瓷制品仿金镀等应用问题进行了讨论.更多还原

【Abstract】 In this paper,the process and application of TiN decorative films formed by vacuum cathodic are deposition are investigated.The relation between pro- perties of TiN films and deposition technology are also analyzed using X-ray dif- fraction, scanning electron microscope,etc.Results show that （1） When the atmosphe- tic pressure was properly raised,droplets Were reduced in size and amount;therefore, both microhardness and corrosion resistance of the films were improved; （2） The color of the films had relations to negative bias and N₂ pressure.Moreover,influence of technological parameters on the texture and the lattice distortion are reported and the application of decorative films to watchcases,watchbands,tableware and ceramics are discussed.更多还原