【摘要】 本文提出了一种新型的两坐标微型驱动器,这种驱动器具有两轴共体,压电元件与带圆弧缺口支点机构一体化的特点。文中对这种驱动器的结构设计和相应的控制器设计进行了研究对整个系统的静,动态特性进行了计算机仿真与实验研究。经计量部门测定,这种驱动器的驱动范围为50μm×50μm,重复精度达0.03μm,带宽在400Hz以上,驱动力为0.74N。这种微型驱动器可作为生物医学工程和所有高精度微细加工领域中的定位和驱动装置。更多还原

【Abstract】 A new two-coordinate micro-actuator is proposed in the paper, which has the features of the two axes in one trunk, the piezoelectric element ( PZT ) and the lever with circular notched pivot in a body. The structural design of the micro-actuator and the controller design of the microactuator are disscussed in the paper. The static characteristics and dynamic characteristics of the micro-actuator system are studied with the methods of computer simulation and experiments. The result shows: The controlled driving range is 50μm×50μm, the controlled accurancy is 0.03μm, the BW is above 400Hz, the driving force is above 0.74N. This new twocoordinate micro-actuator can be widely used in the biomedical engineering and all the fields of super-high accuracy micro-fabrication.更多还原