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提高方形硅膜压力传感器灵敏度的几个重要措施
Important Measures for Increasing Sensitivity of Square Silicon Diaphragm Pressure Transducers
【摘要】 结合扩散硅压阻式压力传感器的研制.根据硅的压阻效应原理,利用方形硅膜的应力分 布公式,论述了提高正方形硅膜压阻式压力传感器灵敏度的几个重要措施.
【Abstract】 Based on the principle of silicon piezoresistive effect and the stress distribution formula of the square silicon diaphragm, some important measures must be take to increase the sensitivity of the square silicon diaphragm piezoresistive pressure transducers.
【关键词】 硅膜;
压力传感器;
灵敏度;
压阻;
【Key words】 silicon diaphragm; pressure transducers; sensitivity; piezoresistive;
【Key words】 silicon diaphragm; pressure transducers; sensitivity; piezoresistive;
- 【文献出处】 福州大学学报(自然科学版) ,Journal of Fuzhou University(Natural Sciences Edtion) , 编辑部邮箱 ,1992年03期
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