【摘要】 在外部电容耦合装置中进行了γ-氨丙基三乙氧基硅烷(APTEOS)的聚合,研究了系统的压力、放电功率、基片距离和等离子气体对聚合膜淀积速率以及对聚合物的结构与性能的影响。应用元素分析、红外光谱、X射线衍射研究了聚合物的结构,并测定了热失重、接触角和表面能。更多还原

【Abstract】 In a capacitively coupled discharge apparatus with external electrodes,γ-amonopropyltriethoxysilane (APTEOS) were polymerized and the effects ofsystem pressure, discharge power and plasma gas on the polymerization rate were in-vestigated. The polymer structure was studied by means of X ray diffration. IR spec-troscopy and element analysis. Some polymer properties such as thermostability, hy-drophobicity and surface energy were also studied.更多还原