【摘要】 众所周知,激光束能量密度高、光斑面积小、单色性好、方向性强和容易控制的特点导致它在材料加工(打孔与焊接)、生物、化学、医学和通信方面的广泛应用.最近发现采用脉冲激光淀积技术制备超导、介质和半导体薄膜时具有纯度高、成分准确、厚度均匀、重复性好和操作方便等许多优点,因而它已经成为最有发展前途的制膜新工艺.本文利用激光的线性吸收模型和溅射粒子角分布函数导出了固体靶刻蚀速率和薄膜淀积速率的解析计算公式.实验表明,计算值与实验值之间的相对误差都不超过10%.更多还原

【Abstract】 Analytical formulas of the ablation and deposition rates of pulsed laser were derived according to linear absorption model and the an gular distribution law of sputtered particles. An expression of the quantum yield of laser was also presented in this paper. Experimental results show that these formulas are accurate with an error of ±10%.更多还原