【摘要】 本文重点介绍了射频放电及射频加热技术在高科技领域和工业方面的一些具体应用。射频磁场感应无电极放电所产生的高能离子束可用于宇航推进;核聚变反应中的中性注入,半导体刻蚀。射频辉光放电产生的低温等离子体,可对纺织品表面处理。空气中射频放电可对卷烟纸电打孔。利用射频感应电场对生物体细胞、组织加热,引起细胞萎缩、坏死或组织纤维化,以达到治疗目的。更多还原

【Abstract】 The article mainly introduces the technology of radiofrequency(RF)dischage and RF heating and some particular application in high technologyfield and industry.The energetic ion beam by RF inductively coupled discharge without electrod may be used in space propulsion,neutral particle injectoron nuclear fusion and semiconduct etching.The low temperature plasma produced by RF glow discharge may cause strong oxidation and surface amelioration of textile.RF spark discharge in atmosphere may be used to staticperforation to increase permeability of cigarette paper.Using RF inductivelyelectric field can cure benign hyperplasia by heating biological cell and tissue,causing cell atroply,necrosis or tissue fibrosis.更多还原