【摘要】 介绍了一种新型Li₂SnO₃厚膜湿敏元件。用X-射线粉末衍射图和电子能谱分析了该湿敏元件感湿体的组成和价态。由这种材料的物理机制和极化机制,建立了等效电路模型。用复阻抗分析法分析了感湿机理并得出如下结论:（1）晶界表面电阻随相对湿度上升而下降,是主要敏感部分。（2）导电载流子不只是氢离子或水合氢离子而且还有锂离子。（3）在高湿下存在电解质电导。更多还原

【Abstract】 A new thick film humidity sensor Li2SnO3 is described The composition and valence state of this material are given by X-ray diffraction patterns and electronic energy spectra respectly.The equivalent circuit meehanism was set up with the mechanism of physics and polarization. The humidiby sensitive mechanism of the material was analysed by the method of complex tinpedonce analysis. These results are obtained as following:(1 ) The resistance of the grain surface which is the ma(?)n sensitive part decreases as increasing relative humidtty. ( 2 ) The conductive carrier of this humidity sensor is not only H+ or H2O+ but also Li+ . ( 3 ) Electrolyte conduction exists in high humidity region.更多还原