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三坐标光栅智能传感器数控系统
Intelligent Numerically-Controlled System of Three Coordinate with Grates
【摘要】 本文探讨了光栅测量的基本原理和三座标光栅智能传感器数控系统设计的基本方案;探讨了影响系统稳定度的重要因素,以此为例进一步讨论了智能仪器、仪表设计过程中应予考虑的关键要素。
【Abstract】 The paper discussed the basical principal of measurement with grates and the design of intel- ligent numerically-controlled system of three coordination with grates.It studied the factors which in- fluence on the stability of system and with the result further studied the keyproblems on designe of in- telliged instrument.
- 【文献出处】 长春光学精密机械学院学报 ,Journal of Changchun Institute of Optics and Fine Mechanics , 编辑部邮箱 ,1992年04期
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