【摘要】 以 CH₃COCH₃/H₂为工作气体,用 HFCVD 方法,制备出适用于红外光学的金刚石薄膜。用 SEM 观察到了所制备膜的表面晶形。讨论了金刚石薄膜的红外增透性。更多还原

【Abstract】 Thin diamond films used for infrared optics have been prepared by HFCVD using CH₃COCH₃/H₂ as an operating gas.Surface crystal formation of the prepared films is observed by SEM,and their infrared transmissivity is discussed.更多还原