【摘要】 本文介绍了微型计算机与俄歇电子能谱仪的接口软硬件及在微机控制下得到的铜样品的俄歇电子能谱,讨论了一次束流、调制电压等实验参数对谱图质量的影响,并总结出最佳实验条件。文中还着重研究了平均法、光滑样条法、积分、微分、卷积及去卷积等数值方法在谱线平滑化、本底扣除和峰形恢复等方面的作用,并建立了一整套俄歇谱线数据处理的算法及程序。作为一个实例,文中还介绍了实测铜峰的峰形恢复过程及结果。更多还原

【Abstract】 The interface hardware and software between GW 0520-CH micro-computer and ourAES apparatus, including PHI 10-155 CMA, EG & C 128A lock-in amplifier and SY-1 scan-ning power, are described. with the aid of a micro-computer, a satisfactory AES spectra ofCu specimen was obtained. The influence of primary electron currenti ntensity and modulateamplitude upon AES spectra is studied. A series of numerical methods such as moving average, smooth spline, integratiou,differentiation, convolution and deconvolution are discussed. we have found that these me-thods, especially smooth spline and deconvolution, are significant for AES spectra qualityimprovement. The smooth spline function can be used in noise minimizing, background sub-traction, integration and differentiation. A spectrum obtained by any instrument can be con-sidered as the convolution of the actual spectrum and a distortion function. The constitutionof a distortion function is very complicated. But based on some assumption, we retrivedthe actual AES spectra successfully by deconvolution method with the elastic peak as thedistortion function. As an example, the retrieved AES spectrum of Cu specimen is shown.with all these methods, a set of procedure for AES data processing such as smoothing, back-ground subtraction, integration, differentiation, and AES peak retrieving is programmed. Finally, an integrated AES software environment, including a series of useful functionssuch as operating parameters selecting, spectra data acquisition, display, store, printnut,zeom, pan and processing are described. with concise multilevel pop-up menus and windows,the software is virtually intuitive and can be operated with extraordinary ease.更多还原