【摘要】 本文给出了Al-Ti/W-PtSi-Si、Al-Ti/W-Si等多层结构电学性能,特别是欧姆接触与抗电迁移性的研究结果.包括电子能谱分析,扫描电镜观测表面形貌,电迁移激活能的确定以及在场感应晶体管和集成电路中的应用效果等.还讨论了相关的作用机理.更多还原

【Abstract】 In this paper, the electrical characteristics, especially the ohmio contact and electromigration properties of the Al-Ti/W-PtSi system were studied. The surface components, interface profile and the variation of surface morphology with the annealing treatment conditions of this sysbem were observed by AES and SEM methods. The activation energy of the elecbromigration process was also presented. Surther, We investigated the application effects of the system Al-Ti/W-PtSi for SIT devices and 10, and got excellent effects. Finally, the action mechanism concerned with these effects were discussed.更多还原