节点文献
计算机辅助纳米级圆度测量技术
Computer-aided Nanometer Roundness Measuring Technique
【摘要】 本文讨论多步法误差分离技术的方法误差和系统误差。按此法由Talyrond3型圆度仪、精密分度转台和IBM-PC 微机组成计算机辅助纳米级圆度测量系统,将圆度仪的测量精度由原来0.025μm 提高到0.002μm。该项技术的推广应用对我国现有圆度仪的技术改造具有重要意义。
【Abstract】 The method error and system error of multi-step error sepa-ration technique are discussed in detail in this paper.The computer-aidednanometer roundness measurement system which consists of a Talyrond 3 round-ness instrument,a precision indexing table and an IBM-PC micro-computer,has improved the measuring accuracy of the roundness instrument from origi-nal 0.025μm to 0.002μm.The extended application of this technique has greatsignificance for technical reform of our existing roundness instruments.
【基金】 国家自然科学基金
- 【文献出处】 仪器仪表学报 ,Chinese Journal of Scientific Instrument , 编辑部邮箱 ,1991年04期
- 【被引频次】5
- 【下载频次】61