【摘要】 本文报导用真空共蒸发沉积获得了 In 掺杂的 Cds 簿膜.研究了 In 掺杂量、衬底温度 Ts 与簿膜的方块电阻、晶粒大小等的关系.得到了随 In 掺杂量的增加,方块电阻减小和晶粒度增大.另外,对 CdS 簿膜的光学性质也作了测量.更多还原

【Abstract】 In this paper,we have been obtained In-dopeed CdS thin films by the vaccum co-evaporation deposited.We have studied the relation to the In-doped quality,the substrate tem- perature Ts and the square resistence,grain size of CdS thin films.We found, with the In-doped quali- ty increase the square resistance reduce and the grain size increase.Another hand,we have been meas- tared the optical property of CdS thin films.更多还原