【摘要】 本文应用Auger电子能谱及透射电镜研究了纯Fe表面分别注入Ni⁺,Mo⁺,B⁺等单种离子及组合注入3种离子所引起的表面层化学成分分布及微观结构的变化。离子能量50—150keV,剂量5×10¹⁵-4×10¹⁷Ions/cm²,室温注入。Auger谱表明,注入Ni⁺,Mo⁺使表面形成浓度达20—30at.-％的碳化层。组合注入形成较厚的表面非晶层,hcp结构的碳化物及fcc结构的奥氏体相。并对级联效应及辐照增强扩散对碳的渗入及形成非晶层的作用进行了讨论。更多还原

【Abstract】 The composition profiles and microstructures of Fe surface layers im-planted with Ni⁺, Mo⁺ or B⁺, respectively, or their combinations have been inves-tigated by AES and TEM. The implantations were carried out with ion energy50--150 keV for dose 5×10¹⁵--4×10¹⁷ ions/cm² at room temperature. The residualpressure in the target chamber is around 1.3×10^-3 Pa. AES shows that a carburiz-ed layer containing 20--30 at.-% C formed at the surface. Its thickness dependson the ion species and the ranges. It has been found that a relatively thick surfaceamorphous layer is formed after combined implantations. Metastable carbides of hcpstructure and fcc austenites are also observed. The effects of collision cascades andthe radiation-enhanced diffusion on the surface carburization and the formation ofamorphous layers are discussed.更多还原