节点文献
用深紫外光刻波带片制作全息透镜阵列和椭圆波带片
Holographic lens array and elliptical zone plate fabricated by deep UV lithography zone plate
【摘要】 本文报道用电子束扫描和深紫外曝光获得的离子刻蚀波带片的一级衍射波和二级衍射波干涉,分别在银盐干板和光致抗蚀剂上制作平面全息透镜阵列和椭圆波带片,并给出用它们聚焦和成像的实验结果。
【Abstract】 Holographic lens arrays and elliptical zone plates are fabricated on holographic plate and photoresist by using interference of the 1st order diffraction and the 2nd order diffraction beams from ion etching Fresnel zone plate obtained by electronic beam scanning and deep ultraviolet lithography techniques. The experimental results of focusing and images produced are given.
- 【文献出处】 中国激光 ,Chinese Journal of Lasers , 编辑部邮箱 ,1991年06期
- 【被引频次】1
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