【摘要】 用N₂激光337.1nm谱线辐照,能有效地引发顺酐型和环氧型不饱和聚酯树脂组成的光致抗蚀剂的固化反应。用付立叶交换红外光谱法跟踪反应动力学过程,并用溶解试验检验固化效果。讨论了反应转化率,反应速率与引发剂浓度的关系。更多还原

【Abstract】 Irradiation with N2 laser(337.1nm)is able to effectively initiate the curing reaction of the photoresists consisted of MA type and epoxy-type unsaturated polyester resin. Kinetics of the reaction is followed with FTIR method. Trial of sovability is made so as to test the curing result.Dependence of conversion ratio and reaction rate on the concentration of initiator has been discussed.更多还原