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激光气相法研制硅系超微粉
SYNTHESIS OF SILICON SERIES ULTRAFINE POWDERS BY LASER INDUCED VAPOR-PHASE REACTION METHOD
【摘要】 <正> 激光气相法是制备超微粉末的新方法之一,目前还存在超微粉末粒径太小难于收集,原料SiH4价格较昂贵等困难。我们以SiH4为主要原料,成功地合成出超微Si、Si3N4、SiC粉末,研究了反应条件对超微粉性能的影响,探索了用廉价原料代替SiH4的可能性,并且在超微粉的收集方面做了若干探索,取得了一些有意义的结果。
【Abstract】 In the present paper, the principles and devices for producting ultrafine powders by laser induced vapor-phase reaction method is presented. The ultrafine powders of Si, Si3N4 and SiC is successfully prepared with a 150W CW CO2 laser as light source and SiH4 as main raw- material. The influence of experimental conditions on properties of ultrafine powders is investigated. The pooossibility of substitution of cheaper materjals for SiH4 is also discussed. This study is expected to mave a good prospects in industrial applications.
- 【文献出处】 化学研究与应用 ,Chemical Research and Application , 编辑部邮箱 ,1991年04期
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