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MCT液相外延薄膜的生长和特性
Growth and Property of Hg1-x Cdx Te LPE Films
【摘要】 用开管水平液相外延系统从富Te溶剂中生长了不同x值的MCT薄膜。经X射线衍射、Hall电学参数、红外光谱、扫描电镜、X射线能谱仪和电子通道花样分析测试,结果表明:外延薄膜表面平整,光学参数较好,纵向、横向组份均匀,晶体结构完整,电学参数较好,外延膜质量优良。短波材料(n型):载流子浓度3.54×1014cm-3,迁移率1.63×104cm2V-1s-1;中波材料(n型):载流子浓度9.95×1014cm-3,迁移率为1.76×104cm2V-1s-1;原生长波材料(n型):载流子浓度为2.15×1015cm-3,迁移率2.00×104cm2V-1s-1。
【Abstract】 The growth of Epitaxial films of Mercury Cadmium Tellurid(MCT) with various x values from Te-rich solution in an open tube sliding system is studied. LPE films of MCT have been grown on CdTe substrates and their high quality has been confirmed by Infrared transmission, X-ray Diffraction, Hall and composition measurements. Typically the FWHM value is 158 arc. second, the hole concentration 3.15×1016cm-3, the Hall mobility 1532.6cm2 V-1 s-1 for x=0.315 MCT film; the electron concentration 2.15×1015cm-3, the Hall Mobiliiy 20024.1cm2 V-1 s-1 for x=0.200 as-grown MCT film.
【Key words】 Mercury Cadmium Telluride(MCT); Liquid Phase Epitaxy(LPE); Substrate material; Properties of films;
- 【文献出处】 红外技术 ,Infrared Technology , 编辑部邮箱 ,1991年01期
- 【被引频次】3
- 【下载频次】43