【摘要】 对非晶态Fe-Cr-Al/Si薄膜研究了方块电阻与灵敏度、电阻温度系数、电阻率以及薄膜厚度等的关系;根据升温时薄膜电阻开始剧变推算了薄膜的晶化温度,并评估了Fe-Cr-Al/Si薄膜作为力传感器敏感材料的品质。更多还原

【Abstract】 Displaying a good linearity between the resistance and the stress, the amorphous Fe-Cr-Al/Si thin film is promising to be used as a transducer. Here the dependence of gauge factor, the temperature coefficient of resistance, the resistivity on sheet resistance and the thickness of the films are reported. Heat treatments of the samples are investigated. The crystalization temperature of the films is estimated by the drastic change in resistance during heating. Based on thess experimental results, an evaluation about the usefulness of the films for force transducer is made.更多还原