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XYH-86小面积X荧光涂层测厚仪

XYH-86 X-ray fluorescence coating thickness gauge for small areas

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【作者】 乐安全林金锌朱节清谷英梅顾连学韩发生徐君权王裕政王志芳

【Author】 Le Anquan Lin Jinxin Zhu Jieqing Gu Yingmei Gu Lianxue Han Fasheng Xu Junquan Wang Yuzheng Wang Zhifang(Shanghai Institute of Nuclear Research, Academia Sinica)

【机构】 中国科学院上海原子核研究所中国科学院上海原子核研究所

【摘要】 本仪器利用X射线荧光分析原理和微机技术研制而成的。以小型X射线管作激发源,射线用小孔准直,样品用光学定位,样品最小测量面直径为0.1mm。微机多道实时显示能谱。它能快速、精确、无损测量多种微小面积上的单、双涂层厚度和合金涂层厚度及成分,结果由屏幕显示并打印输出,还能作统计处理。

【Abstract】 This instrument was based on the XRF technique and microcomputer. X-ray radiation from a small X-ray tube was collimated with a small hole and the emitted fluorescence spot at the surface of a sample could be seen with an optical microscope. The minimum diameter of the measuring area was 0.1mm. A microcomputer-based MCA was used. The unit was able to measure thickness of either single or double coating layers noEdestructively and determine thickness and composition of an alloy coating layer simultaneously.

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