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深度沉积SiC工艺研究

In-Depth Deposition of SiC

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【作者】 刘文川孙守金李敏君

【Author】 Liu Wenchuan;Sun Shoujin;Li Minjun;Institute of Metals of the Chinese Academy of Sciences;

【机构】 中国科学院金属研究所

【摘要】 以碳布层叠为增强骨架,用深度沉积SiC工艺,可使纤维束内小孔被热解碳填充或密封,纤维束之间的大孔被SiC充分渗透,然后在样品表面上形成SiC涂层。这种复合材料有很好的抗氧化性能,它的每个纤维束都被SiC保护起来了。由于采用深度沉积,克服了SiC涂层脱落的缺点。

【Abstract】 Taking carbon cloth lay-up as reinforced skeleton, the in-depth deposition technique of SiC has been studied. The smaller pores within the yarn strands are filled with pyrocarbon or realed up, the located larger pores between the carbon yarn strands are fully infiltrated with SiC. Finally, SiC Coating is deposited on outer surface of substrate. Better resistance toward air-oxidation is found for the composites, where each individual carbon yarn strands is protected by SiC. The drawback of the spallation of SiC coating is overcome by indepth depositon of SiC.

  • 【文献出处】 高技术通讯 ,High Technology Letters , 编辑部邮箱 ,1991年05期
  • 【分类号】TB306
  • 【下载频次】17
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