【摘要】 用透射电镜研究了热丝增强式化学气相沉积(HFECVD)金刚石薄膜和界面的微观结构及生长方式。Plane-view 样品观察表明,不同颜色薄膜的内部晶粒尺寸、缺陷类型及生长方式不同。主要有两类:一类以五次孪生方式生长;另一类是位错和微孪晶共存生长。Gross-section 样品观察表明,衬底单晶硅和金刚石多晶薄膜之间存在一层厚度为0.2—0.8μm的非晶过渡层,金刚石膜在过渡层成核。更多还原

【Abstract】 The microstructure and interface of the diamond film which was made by hot filament enhanced chemical vapor deposition(HFECVD)have been studied using the TEM method.Plane-view TEM shows that there are two kinds of typical morphology.One kind is grey in color and has a larger size of grains, each of which is a four petaled particle with microtwins and dislocations.The other is of the color red-brown and has smaller grains,each of which is a five -multiply twinned particle.Cross-section TEM reveals that between the diamond layer and the silicon substrate there is a transitional region which consists of an amorphous-like matter with a width of 0.2-0.8μm,where the diamond film nucleates.更多还原