【摘要】 本文介绍直接用Ｆｅ作靶材料，空气中的氧作反应气体，利用等离子体反应溅射淀积出氧 化铁簿膜．同时在Ｆｅ靶上挂所需掺杂元素的金属丝．可方便地实现掺杂．气敏检测结果表明，这 是一种酒敏材料．借助于ＸＲＤ、ＳＥＭ的分析和观察表明．在７５０℃左右热处理之前，簿膜是一种 非晶氧化铁结构．它与烧结型γ－Ｆｅ２Ｏ３或α－Ｆｅ２Ｏ３的结构不同，具有对乙醇的独特选择性．更多还原

【Abstract】 This paper deals with the direct use of iron as sputtering target and oxygen as reactive gas soure in order to deposite iron oxide film by means of plasma-activated reactive sputtering techniques. In order to fulfil convenient doping, we place the metal wire on the target. The results measured in gas response of film show that the film is sensitive to alcohol. The results given by XRD and SEM analysis show that the film is a kind of amor- phous. It is the difference from γ-Fe2O3 or α-Fe2O3 in crystal state that the film sensor has excellent selectivity.更多还原