【摘要】 提出了一种波面干涉与全息术结合制作的实时全息三波面干涉仪。可用于光学平面度,薄膜厚度的检测。与其它干涉仪相比,具有独特的优点。更多还原

【Abstract】 Real-time holographic three wavefront interferometer combineing wavefront interference with holography has been proposed in this paper. The apparatus can be used for a number of pratical applications including the measurement of flatness for an optical flat. Thickness for transmissive or refective films. It has peculiar character comparing with other interferometers.更多还原