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THE THINNING EFFECT OF ION IMPLANTATION

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【作者】 贝韵芬章宗城王明红李鸿柳襄怀

【Author】 Bei Yunfeng Zhang Zongcheng Wang Minghong Li Hong (China Textile University)Liu Xianghuai (Shanghai Institute of Metallurgy,Academia Sintca)

【机构】 China Textile UniversityShanghai Institute of Metallurgy Academia Sinica

【摘要】 <正> In this paper,we shall study in detail the change regularities of surface roughness parameters intwo and three dimensions under some implantation conditions.And a computer is used to calcu-late and analyze the topographies of the surfaces before and after ion implantation,therefore themechanism of the changes of surface topographies and that of wear resistance after implantationscan be understood further.

【Abstract】 In this paper,we shall study in detail the change regularities of surface roughness parameters in two and three dimensions under some implantation conditions.And a computer is used to calcu- late and analyze the topographies of the surfaces before and after ion implantation,therefore the mechanism of the changes of surface topographies and that of wear resistance after implantations can be understood further.

  • 【文献出处】 Journal of China Textile University(English Edition) ,中国纺织大学学报(英文版) , 编辑部邮箱 ,1991年01期
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