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YBa2Cu3O7-x超导薄膜的离子束改性
Ion Beam Modification of YBa2Cu3O7-x Superconducting Thin Films
【摘要】 本文主要研究了离子注入对YBa7Cu3O7-x薄膜超导性质的影响.测量了Ar离子注入剂量与超导转变温度Tc之间的关系.实验结果表明,高质量的YBa2Cu3O7-x 超导薄膜具有一定的抗辐照性.随着注入剂量的增加,临界电流密度Ic下降很快,但零电阻转变温度Tc却下降较慢.分析和讨论了离子注入对YBa2Cu3O7-x中一维Cu-O链和二维Cu-O面的影响,探讨了离子束改性手段在YBa2Cu3O7-x超导薄膜图形加工中应用的可能性.
【Abstract】 The effect of Ar ion implantation on superconducting properties of YBa2Cu3O7-x thinfilms have been studied with resistance measurements and X-ray diffraction. The experi-mental results show that YBa2Cu3O7-x films with high quality had some resistibility to ion ir-radiation.As the Ar ion dose increases,The transition temperature Tc decreases slowly, butthe critical current density Jc deceases very fast We discussed the influence of Ar ion implan-ration upon one-dimensional Cu-O chains and two-dimensional Cu-O planes.We also explo-red the possibility of using ion implantation technique to pattern YBa2Cu3O7-x superconduc-ting thin films and to make superconducting electronic devices.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1991年10期
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