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高温超导薄膜GdBa₂Cu₃O_7-x的制备和分析

Preparation and Analysis of GdBa₂Cu₃O_7-x Superconducting Thin Films

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【Author】 Yi Huairen/Institute of Physics. Academia Sinica Beijing, 100080Wang Ruilan/Institute of Physics. Academia Sinica Beijing, 100080Li Hongcheng/Institute of Physics. Academia Sinica Beijing, 100080Lu Bin/Institute of Physics. Academia Sinica Beijing, 100080Liu Wei/Institute of Physics. Academia Sinica Beijing, 100080Chen Yuan/Institute of Physics. Academia Sinica Beijing, 100080Yin Bo/Institute of Physics. Academia Sinica Beijing, 100080Rong Xishen/Institute of Physics. Academia Sinica Beijing, 100080Li Lin/Institute of Physics. Academia Sinica Beijing, 100080

【机构】中国科学院物理研究所；中国科学院物理研究所北京100080；北京100080；北京100080；

【摘要】我们用原位直流磁控溅射的方法,在（100）SrTiO₃,（110）SrTiO₃,（100）LaAlO₃和（100）Zr（Y）O₂衬底上制备了高质量外延生长的GdBa₂Cu₃O_7-s高温超导薄膜,重复性非常好.在这四种衬底上生长的超导薄膜最高零电阻转变温度 Tco分别为 93.2、93.1、92.6和 92.5K,77K零场下的临界电流密度分别为 3.0 ×10⁶,3 × 10⁵,3.6 ×10⁶和 1.4 × 10⁶A/cm².我们用扫描电镜（SEM）,透射电镜（TEM）,反射高能电子衍射（RHEED）和不同几何结构的X射线衍射研究了薄膜的结构,这些研究结果证明薄膜系外延生长的.更多还原

【Abstract】 High quality epitaxial superconducting thin films of GdBa₂Cu₃O-x have been preparedin situ on （100）SrTiO₃, （110）SrTiO₃,（100）LaAlO₃,（100）Zr（Y）O₂ substrates by dc-magnetronsputtering.The rsproducibility is very good. The best films grown on the four substrates havezero-resistance critical temperature Tco of 93.2, 93.1, 92.6, 92.5K and critical current densityof 3×10⁶, 3×10⁵, 3.6×10⁶, 1.4×10⁶ A/cm³ at 77K, respectively.The film structure were stu-died by scanning electron microscopy（SEM）, transmission electron microscopy （TEM）, reflec-tion high energy electron diffraction （RHEED） and X-ray diffraction spectra in differentgeometries.The results show that the superconducting thin films are grown epitaxially on thesubstrates.更多还原