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SnO2/Fe2O3多层薄膜与SnO2单层薄膜特性差异的研究

Investigation of Property Differences Between SnO2 Films and SnO2/Fe2O3 Multilayer Films

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【作者】 马晓翠阎大卫邹慧珠

【Author】 Ma Xiaocui/Department of Electronic Science, Jilin University, Changchun, 130023Yan Dawei/Department of Electronic Science, Jilin University, Changchun, 130023Zou Huizhu/Department of Electronic Science, Jilin University, Changchun, 130023

【机构】 吉林大学电子科学系吉林大学电子科学系 长春130023长春130023长春130023

【摘要】 用等离子体化学气相淀积法制备的SnO2/Fe2O3多层膜的一些电学特性和气敏特性不同于SnO2单层膜.当SnO2层的沉积时间很短时,多层膜在空气中及在敏感气氛中的电导随沉积时间的增加而下降.多层膜的响应及恢复时间也呈现一些反常的变化.本文提出一个包括过渡层在内的模型用以解释这些现象.过渡层可在沉积过程中产生,存在于SnO2与Fe2O3界面附近,其厚度达30nm数量级.

【Abstract】 Some electrical and gas sensing properties of SnO2/Fe2O2 multilayer films prepared byplasma CVD are different from that of monolayer SnO2 films. When the time for depositingSnO2 layer is short, the conductance of the multilayer films in air and in sensing gas ambienmay decrease with increase of the deposition time for the multilayer films. The response timealso shows abnormal variation when the deposition time is changed for the multilaryer films. Amodel including a transition layer, which may be produced during the plasma process, withthe order of 30 nm existing near the interface between SnO2 and Fe2O3 layers has been sug-gested to elucidate the phenomena.

【基金】 国家自然科学基金
  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1991年07期
  • 【被引频次】7
  • 【下载频次】31
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