【摘要】 激光陀螺增益管为玻璃封包的激光器件，内充比例一定的低压强 Ｈｅ3和 Ｎｅ混合气 体。Ｈｅ３的渗漏将直接影响增益和寿命．本工作用四极质谱计检测充Ｈｅ３的增益管向 高真空测试系统的渗漏所引起的 Ｍ３分压强增高与无增益管时高真空系统内本底的Ｍ３ 分压强相比较来判定 Ｈｅ３渗漏的有无；并以 Ｈｅ４的标准漏孔作为参考，粗略地估算微 晶玻璃封包材料的增益管的Ｈｅ３渗漏率和渗漏常数。更多还原

【Abstract】 A gain tube of laser gyro is a laser device with glass package in which the mixed gasses of Hes and Ne in certain ratio is filled at low pressure. Leak of Hes will directly affect the gain and the lifetime of the device. In this work, leak from the gain tube filled Hes to high vacuum measuring system could be detected by a quadrupole mass spectrometer. which will increase the partial pressure of Mass 3 and compare with the background of partial pressure of Mass 3 in high vacuum system without the gain tube, so that it can be decided whether there is He3 leakage. And with reference to a standard leak for He4, the leak rate and the permeation constant of microcrystal glass used as packing material of the gain tube for He3 could be roughly estimated.更多还原