【摘要】 微电子学中微细加工及表面分析技术要求亚微米束径的初离子束系统。我们研制成了源尖微调型的亚微米离子枪。它由液态金属离子源,源尖微调装置,离子透镜及静电八极偏转器等组成。在束能12keV时,束流1×10^-9A,束径达亚微米。源尖调节精度X、Y:5μm,可调范围X、Y:1.000mm;束扫描范围2×2mm²。该枪已用于扫描离子显微镜中。更多还原

【Abstract】 Micro-manufacture and surface analysis need ion beam systems of submicron spot size as projectiles. We have made the ion gun with the tip microadjusters’ assembly. The gun is composed of the liquid metal ion source of Ga, the tip microadjusters’ assembly, the ion lens, and the electrostatic octopole deflector. The spot size is in submicrometer range at 12keV, the beam current is 1×10^-9A. The precision of the tip microadjustors is X, Y: 5μm, the adjustable scale range is X. Y: 1.000mm. The beam scanning area is 2×2mm². The gun has been applied in a SIM.更多还原