【摘要】 本文描述了一套适用于充气器件寿命研究的质谱诊断系统。为避免器件内气体的连续损失,克服质谱仪的非线性和灵敏度不断变化造成的困难,该系统通过一个改进型极微流量阀进样,并采用标准气样比较法,对测试结果进行校准。应用该系统对小型封离式TEA CO₂激光器进行了寿命过程中的质谱分析。实验表明该系统是可行的,具有实用性。更多还原

【Abstract】 In this paper a mass-spectrometric diagnosing system suitable for lifetime studies of gaseous devices is described. To avoid the continuous depletion of gas from the gaseous device and to surmount the difficulties caused by the non-linearity and the variation in the sensitivity of quadrpole mass spectrometer, an improved ultramini-flow valve is used as a sampling tool, and the test results of the gaseous device are calibrated by those of the standard gas sample. As an application of this system, an in situ analysis of gas components for a sealed-off mini-TEA CO₂ laser has been performed during its lifetime（1.5×10⁶ Pulses）. This experiment showed that the system presented here could be valusble for the lifetime studies of sealed-off gaseous devices.更多还原