【摘要】 一些导体、半导体和绝缘体样品用辉光放电型溅射中性粒子谱仪作了质谱分析。溅射中性粒子流中,原子碎片占多数时,信号离子流能正确反映样品组分的含量;若分子碎片较多时,由于电离时伴有分解过程,定量分析较为困难。更多还原

【Abstract】 The mass spectra of a few samples including conductor, semiconductor and insulator have been observed by sputtered neutral mass spectrometry (SNMS) with glow discharge. In sputtered neutrals, the intensities of the ion current in the mass spectra are indicative of abundance of the species, if the majority is atomic species. whereas, the quantitative analysis is more difficult, if the majority is molecular species.更多还原