【摘要】 扫描离子显微镜-飞行时间质谱仪（即SIM/ToF-SIMS）的研究是表面分析领域的前沿课题。本文叙述了其前半部分,自制SL-1型扫描离子显微镜的原理、设计加工及实验结果。Ga离子束能12keV时,束流1×10^-9A、束径达亚微米,并得到ISE及ISI两种象。更多还原

【Abstract】 The research of SIM/ToF-SIMS instrument is an advanced subject in the field of surface analysis. The Scanning Ion Microscope （SIM） is its first part. This paper describes the principle, design, manufacture, and the experimental results of SIM of type SL-1 which is homemade by us. The current of Ga ion beam is 1×10^-9A, the spot size is in submicrometer range at 12keV. The ISE and ISI images were observed.更多还原