【摘要】 本文在比较了误差分离的几种方法之后,着重讨论了多步法的方法误差和系统误差。按此法建立了计算机辅助毫微米圆度测量系统,将圆度仪的测量精度(2σ)从原来的0.025微米提高到0.002微米,足以满足精密工程、惯性技术和宇航科学等领域对超精圆球的计量要求。更多还原

【Abstract】 In this paper,after comparing some error separation methods,multi- step method is used,its method error and system error are studied and a computer-aided test system is built accordingly.CAT nanometer roundness measurement system improves the measuring accuracy of the roundness instrument from original 0.025μm to 0.0021uμm.It is sufficient to meet the metrology requirements of ultra-precision balls in areas of precision engineering,inertial technique,astronautical science etc.更多还原