【摘要】 本文设计了一种新型扫描激光刻槽机。分析了刻槽机的激光扫描系统和机械传动系统。YAG激光刻槽机每分钟能刻20个电阻,扩阻率500～3000倍;槽宽50μm;阻值精度±0.5%(R<1mΩ),±1%(R>1MΩ)。更多还原

【Abstract】 This paper introduces a new type optical scanning method of laser spiral machine,and analyses laser scanning system and mechanic system.The prccessing speed of the machine is20 resistors per minute,the multipling ratio of the resistors is 500-3000 times,the cutting widthis 50μm,the accuracy of the resistors is ±0.5%(R<1mΩ),±1%(R>1mΩ).更多还原