【摘要】 本文中报道优质SnO₂:F透明导电薄膜的制备方法,通过对薄膜透射率和电导（方块电阻）的测量分析,研究薄膜特性与工艺条件的关系,探讨最佳工艺条件和薄膜形成规律。提出一种SnO₂:F 晶体缺陷结构模型,可以较好解释电导随 F掺杂浓度的变化结果。更多还原

【Abstract】 This paper reports preparation method of quality Sn02:F transparent conducting thin films. Base on the measures and analyses of the transmittance and sheet resistivity of Sn02:F films, we study relations between the properties and technological conditions of the films, explore the optimal technological conditions and formed law of the films. We have put forward a structural motel of defects in Sn02:F crystal which can fine explain changes of conductance with the concentration of fluorine dopant.更多还原