【摘要】 一种容量达1250MB 的磁盘驱动器正在研究中,其关键是利用了电子束曝光及半导体工艺技术.本文对高速、大容量磁盘驱动器进行了探索,利用电子束及离子束技术完成了伺服盘的刻蚀工作,伺服盘道密度近2000TPI.更多还原

【Abstract】 Recently,a new disk driver,capacity achieving1250MB,mainly usiug electron-beem exposureand semiconductor technique,has been investi-gated.In this paper,we has studied tn highspeed and high capacity disk driver.Usingelectron-beem and ion-beem technique,thework etching a servo disk has been finish-ed,the servo disk track density has achiev-ed about 2000 TPI.更多还原