【摘要】 介绍用声发射监测刻划过程来测量膜与底材结合力的实验方法。用该方法能实时准确测量膜破坏的临界载荷,并且测量结果对工艺参数是敏感的。更多还原

【Abstract】 The experimental method of acoustic emission monitoring of scratch process for measuring binding force between film and substrate can be used for real-time determining of critical load of film and the measuring results are sensitive to technological parameters.更多还原