【摘要】 本文介绍了表面畸变的晶体中X射线动力学衍射分层模型的计算原理和通过计算机模拟双晶摇摆曲线获得畸变层信息的方法,讨论了不同的双晶排列方式对摇摆曲线和模拟计算的影响,分析了畸变层内应变、损伤分布与摇摆曲线的关系,并以B~+注入Si(100)晶片为例,给出了模拟结果。更多还原

【Abstract】 A lamellar X-ray dynamic diffraction theory of the surface distorted crystals and the simulation method for obtaining information in distorted layers are presented. Influence of different double crystals’ arrangement upon rocking curves(RCs) and simulation procedure are, disscussed. The relation between RCs and the depth distributions of strain and damage in distorted crystals is analysed. As an example, the simulation results of the B+ implanted Si(l00) wafers are given.更多还原