【摘要】 本文研究了在三种不同波长的脉冲激光（365 nm,560 nm和1064 nm）辐照下超声Cl₂分子束与多晶Ta表面的化学反应动态学.由四极质谱和飞行时间增（TOF）测定了产物的质量分布和速度分布.该反应的主要产物为TaCl,TaCl₂,TaCl₃及TaCl₄;它们的TOF谱都可用Maxwell-Boltzmann分布拟合,所得的平动温度分别在500K—1500K范围内.测定了各种产物相对产率与激光能量密度和入的Cl₂分子平动能的关系.此外,对此气-固表面反应的机理进行了讨论。更多还原

【Abstract】 The supersonic molecular beam technique is used to study the dynamics of laser-induced surface reactions of Ta surface with chlorine at three different wavelengths（355, 560, 1064 nm）. The mass and velocity distributions of the reaction products aredetermined by the time-resolved mass spectrometry. The observed time-of-flight（TOF）spectra of the products show that the main products are TaCl, TaCl₂, TaCl₃ and TaCl₄and there is no TaCl₅ observed. Their TOF spectra can be fitted with Maxwell-Boltz-mann distributions at translational temperatures in the range of 500-1500K. Theeffect of translational energy of incident Cl₂ molecules and laser fluences on the laser-induced Cl₂-Ta surface reactions at different wavelengths are presented. Finally, thepossible reaction mechanism is discussed based on the experimental observations.更多还原