【摘要】 碲氧薄膜是很有希望的可擦写光盘介质材料。本文用射频溅射技术制备碲氧系统的薄膜。测定热处理前后薄膜的光学特性(光透过率、反射率、折射指数、光吸收系数和光能隙)和 X 射线衍射特性,并研究了这些性能与靶材的组份关系,还测定了这些薄膜激光喇曼光谱,并讨论它们的结构特征。更多还原

【Abstract】 The Te-O thin film as a reversible optical recording medium is a very promi-sing material.In our laboratory,this film was prepared by rf-diode sputteringtechnique,the optical properties,such as trasmissivity,reflectance,absorption coef-ficient,optical gap,and the X-ray diffraction characteristics as well as the Ramanspectra of the film obtained were measured before and after heat treatment.Therelationship between the optical properties measured and the compositions of thesputtering targets used was studied,and the structural characteristics of the filmdiscussed.更多还原