【摘要】 本文简述了气相法生长金刚石薄膜的基本过程,论述了反应气体系统及碳源浓度、激活源、基片温度和预处理等参数对金刚石结构和性能的重要影响.更多还原

【Abstract】 This paper reports the fundamental process of the diamond thinfilms synthesized by gas phase.It deals with the significant influences of thereactive gas systems,carbon concentrations,activated sources,substratetemperatures and pre-treatment on the properties and structures of the films.更多还原