【摘要】 采用脉冲红外TEA—CO₂激光器,研究了半导体材料四氯化硅中杂质四氯化碳的激光解离。考察了激光脉冲数、体系的组成不同时,对激光纯化过程的影响,以及激光化学反应的规律。更多还原

【Abstract】 Laser dissociation of carbon tetrachloride impurity in silicon tetrachlcride as the semiconductor raw material was investigated for using pulsed TEA-CO2 laser.We also discussed the dependence of number of laser pulse and composition on the laser purification, and the behavior of laser chemical reaction.更多还原