【摘要】 本文综述了激光相秽干涉计量学近年来的发展,介绍了这种方法的原理,引入相移的各种方法及测量精度,指出了可能的应用前景。更多还原

【Abstract】 The progress on laser phase-shift interferometry in recent years have been reviewed. In the paper, we present the basic principle, the method of introducing phase-shift and the accuracy of measurement. The possible application in the future has also been pointed out.更多还原