节点文献
光学薄膜镀制技术的对比研究
COMPARATIVE STUDY OF SOME TECHNIQUES USED TO MANUFACTURE OPTICAL COATINGS
【摘要】 本文介绍了两种光学镀膜真空淀积技术——离子辅助淀积和反应离子镀,并详述了近年来的应用及进一步的发展。
【Abstract】 The present paper looks briefly at two types of advanced vacuum deposition technology in the field of optical coating, ion assisted deposition(IAD)and reactive ion plating(RIP); in the meanwhile, focusing on the application in recent years and their prospects.
【关键词】 光学敷层;
光学薄膜;
离子辅助淀积;
离子镀;
【Key words】 Optical coatings; Optical thin films; Ion assisted deposition; Ion plating;
【Key words】 Optical coatings; Optical thin films; Ion assisted deposition; Ion plating;
- 【文献出处】 上海机械学院学报 , 编辑部邮箱 ,1990年01期
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