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干涉图数据处理中的几个合理性判据

On criteria of rationality in interferogram data processing

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【作者】 姚永龙; 曹根瑞;

【Author】 YAO YONGLONG (Department of Precision Instruments, Tsinghua University, Beijing)CAO GENRUI (Department of Opttcal Engineering, Beijing Institute of Technology)

【机构】 清华大学精密仪器系; 北京理工大学光学工程系 北京;

【摘要】 在干涉图数据处理中,构成波差多项式的基底函数的性质,正则方程的求解方法,抽样点的分布与数量等对确定波差函数的解都有影响;同时在数值化的过程中,不可避免地要引入测量误差,它对波差函数的解也有较大的影响.本文利用数理统计分析的方法对上述问题产生的误差进行精确的定量分析,并给出了各自模拟计算的结果及判断波差多项式的基底函数与项数的选择、抽样点的分布与数量、拟合结果等是否合理的定量判据.

【Abstract】 In an interferogram data processing, the characters of base function forming wave aberration polinomials, the solving process of canonical equation, the number of sample points and their distribution all have their influence on the solution of wave aberration functions, as well as the digitization error introduced inevitably into the measurement of interferograms. These errors are quantitatively analysel based on statistics and represented in the way of computer simulation. Meanwhile, the quantitative criteria about the selecting base function and number of terms of polinomials, the number of sample points and their destribution, and the rationality of fit results, are presented.

【关键词】 干涉术; 波象差; 数据处理;
【Key words】 Interferometry; wave aberrations; data proceseing.;
  • 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,1990年06期
  • 【被引频次】2
  • 【下载频次】45
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