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敏兰紫光电探测器的研制

THE INVESTIGATION OF PHOTODETECTOR FOR SENSING TO BLUE-VIOLET LIGHT

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【作者】 张福甲王德明张彦博

【Author】 Zhang Fujia,Wang Deming,Zhang Yanbo(Department of Physics, Lanzhou University ,Lanzhou,730000,China)

【机构】 兰州大学物理系兰州大学物理系 兰州 730000兰州 730000兰州 730000

【摘要】 用能量是100kev,剂量为1013cm的Zn离子,注入到n—GaP单晶衬底所制做的光电探测器,它对波长为380nm~440nm的光具有敏感性。利用俄歇能谱(AES)和x光电子能谱(ESCA),对注入剖面的杂质分布进行了研究。结果表明,注入的Zn离子,它的2p3/2电子的结合能是1021.1ev,比它的标准值低0.4ev,由测试结果给出了这种光电探测器的最大量子效率是34%。

【Abstract】 Optical sensibility of the photodetector using Zinc ions at energy of 100kev and dose 1013cm-2im-plant into n -Gap substrate, which wavelength from 380nm to 440nm to has been investigated. The implantation section impurity was analysed by means of AES and ESCA.The experiment results show that this acceptor impurity level is formed in GaP energy band with implantation of Zinc ions. AES profiles analysys indicates that the implantation doping section is subject to Gauss distribution. The chemical shift and combination state of Zinc ions implantation to Gap were analyised by X photoelectric energy spectrometry. It was found that 2P3/2 electron of Zn having been implanted into Gap which is 1021. lev combined energy. The value is 0.4ev lower than the standard value. As a result it was found that this kind of photodetector has maximum quantum efficiency

  • 【文献出处】 甘肃科学(甘肃省科学院学报) , 编辑部邮箱 ,1990年01期
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