【摘要】 提出了一个晶粒间界的物理模型,以解释多晶硅薄膜晶体管(TFT)的低载流子迁移率和高阈值电压.研制了多晶硅 TFT 的分析软件包TFTNPE,它包括两维数值模拟器和模型参数提取软件,可以用于多晶硅薄膜器件的分析与设计.更多还原

【Abstract】 in this paper,a physical model of grain boundaries is presented to explain the low value of carrier mobility and the high value of threshold voltage for poly-silicon thin film transistors (TFT).A software package, called TFTMPE,is developed,which consists of a two dimensional numerical simulator and a model parameter extractor,it can be applied to the analysis and design of poly silicon TFT.更多还原