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40Cr 钢中注氮深度和浓度分布的理论计算及实验测定

THEORETICAL CALCULATION AND EXPERIMENTAL MEASUREMENT OF DEPTH AND CONCENTRATION DISTRIBUTION OF NITROGEN IMPLANTED IN 40Cr STEEL

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【作者】 丁连元章宗城

【Author】 Ding Lianyuan Zhang Zongcheng (Department of Basic Sciences,Department of Mechanical Engineering)

【机构】 中国纺织大学基础部物理教研室中国纺织大学机械工程系机械制造教研室

【摘要】 本文用解析法计算了40 Cr钢中注氮离子的平均投影射程,标准偏差和浓度分布。同时和AES的实验结果进行比较,表明在—般情况下解析法是计算平均投影射程和标准偏差的一种简便而有效的方法.

【Abstract】 The paper deals with the calculation of the average projected range,the standard devia-tion and the concentration distribution of nitrogen ions implanted in the 40Cr steel byanalytic method.The results of calculation are compared with the experimental ones of AESanalysis,which shows that the analytic method is generally a simple and effective one for cal-culation of the average projected range and the standard deviation.

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