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40Cr 钢中注氮深度和浓度分布的理论计算及实验测定
THEORETICAL CALCULATION AND EXPERIMENTAL MEASUREMENT OF DEPTH AND CONCENTRATION DISTRIBUTION OF NITROGEN IMPLANTED IN 40Cr STEEL
【摘要】 本文用解析法计算了40 Cr钢中注氮离子的平均投影射程,标准偏差和浓度分布。同时和AES的实验结果进行比较,表明在—般情况下解析法是计算平均投影射程和标准偏差的一种简便而有效的方法.
【Abstract】 The paper deals with the calculation of the average projected range,the standard devia-tion and the concentration distribution of nitrogen ions implanted in the 40Cr steel byanalytic method.The results of calculation are compared with the experimental ones of AESanalysis,which shows that the analytic method is generally a simple and effective one for cal-culation of the average projected range and the standard deviation.
【关键词】 钢;
离子注入;
标准偏差;
浓度;
投影射程;
【Key words】 steel; ion implantation; standard deviation; concentration; projected range;
【Key words】 steel; ion implantation; standard deviation; concentration; projected range;
- 【文献出处】 中国纺织大学学报 , 编辑部邮箱 ,1990年03期
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